Advanced Thermal Management of 3D Semiconductor Chips and Packages: From External Cooling to High-Performance Thermal Materials Within the Package
Event Details
October 2, 2026
Join Zoom Webinar
Host: Steve Crago
POC: Amy Kasmir
Next-generation semiconductor packaging and heterogeneous integration demand advanced metal interconnect technologies to achieve ultra-high 3D interconnect densities. However, such densely integrated 3D systems significantly increase heat flux and power density—reaching 500–1000 W/cm²—which leads to severe thermal challenges, including thermal crosstalk, localized hotspots, and thermo-mechanical stress. These effects pose serious risks to device reliability and performance. As a result, effective and energy-efficient thermal management strategies are essential for enabling future high-density 3D systems. In this presentation, I introduce an exterior-to-core thermal management framework for 3D semiconductor chips and packaging, focusing on thermal transport phenomena across multiple length scales, from device and interconnect levels to chip- and package-level architectures. I will also highlight our recent advances in direct on-chip, package-level microfluidic cooling using both single-phase and two-phase approaches, near-junction cooling techniques, and the integration of novel thermal packaging materials designed for enhanced heat spreading and extreme thermal isolation.
