Abstract

HOIL 43/00(2006.01) HOIL 43/02(2006.01) HOIL 43/12(2006.01) HOIL 27/22(2006.01)(52) US CI.??? HOIL 43/02 (2013.01); HOIL 27/222 (2013.01); HOIL 43/12 (2013.01)(58) Field of Classification Search CPC HO1L 43/02; HOIL 27/222; HOIL 43/12

Date

2022

Authors

AP Jacob, E Ramanathan

Inventors

Ajey P Jacob, Eswar Ramanathan

Patent_office

US

Patent_number

11233191

Application_number

16142432