Abstract

Structures including a waveguide core and methods of fabricating a structure that includes a waveguide core. A dielectric layer including a trench with a first sidewall and a second sidewall, and a waveguide core positioned inside the trench between the first and second sidewalls of the trench. The waveguide core has a first width, and the trench has a second width between the first and second sidewalls that is greater than the first width.

Date

2021

Authors

C Meagher, K Nummy, Y Bian, AP Jacob

Inventors

Colleen Meagher, Karen Nummy, Yusheng Bian, Ajey Poovannummoottil Jacob

Patent_office

US

Patent_number

11067751

Application_number

16597323