Abstract

In an embodiment of the invention, a structure includes a back-end-of-line interconnect structure having an interlayer dielectric layer and a cap layer stacked over the interlayer dielectric layer. The structure further includes a waveguide core having a section arranged beneath the cap layer. The waveguide core has a first index of refraction that varies as a function of width, and the cap layer has a second index of refraction. The section of the waveguide core has a width that is selected such that the first index of refraction is substantially equal to the second index of refraction to provide phase matching effective for coupling a portion of an optical signal from the waveguide core to the cap layer. In an embodiment of the invention, a method includes forming a first waveguide core, forming an interlayer dielectric layer of a back-end-of-line interconnect structure, and forming a cap layer of the back-end-of-line interconnect …

Date

2020

Authors

Y Bian, AP Jacob, A Thomas

Inventors

Yusheng Bian, Ajey Poovannummoottil Jacob, Abu Thomas

Patent_office

US

Patent_number

10641956

Application_number

16291346