Abstract

The present disclosure relates to semiconductor structures and, more particularly, to graphene detectors integrated with optical waveguide structures and methods of manufacture. The structure includes a plurality of non-planar fin structures composed of substrate material, and a non-planar sheet of graphene material extending entirely over each of the plu rality of non-planar fin structures.

Date

2019

Authors

AP Jacob

Inventors

Ajey P Jacob

Patent_office

US

Patent_number

10374106

Application_number

15486849