Abstract

METHODS OF FORMING REPLACEMENT FNS FOR A FINFET SEMCONDUCTOR DEVICE BY PERFORMINGA REPLACEMENT GROWTH PROCESS

Date

2016

Authors

AP Jacob, MK Akarvardar, J Fronheiser, WP Maszara

Inventors

Ajey P Jacob, Murat K Akarvardar, Jody Fronheiser, Witold P Maszara

Patent_office

US

Patent_number

9240342

Application_number

13944200