Abstract

We leverage phase-matching between front-end-of-line (FEOL)/middle-of-line (MOL) and back-end-of-line (BEOL) stacks for flexible light control in a monolithic Si photonics platform. The efficient vertical coupling/decoupling enables novel devices with unique functions.

Date

September 14, 2020

Authors

Yusheng Bian, Ajey Jacob, Abu Thomas, Bo Peng, Michal Rakowski, Won Suk Lee, Rod Augur

Conference

Frontiers in Optics

Pages

FTu6E. 3

Publisher

Optica Publishing Group