Publications
Vertical nanowires formed on upper fin surface
Abstract
One illustrative device includes, among other things, at least one fin defined in a semiconductor substrate and a substantially vertical nanowire having an oval-shaped cross-section disposed on a top surface of the at least one fin.
- Date
- 2020
- Authors
- S Bentley, RA Farrell, G Schmid, AP Jacob
- Inventors
- Steven Bentley, Richard A Farrell, Gerard Schmid, Ajey Poovannummoottil Jacob
- Patent_office
- US
- Patent_number
- 10685847
- Application_number
- 15598905