Abstract

Waveguiding structures and methods of fabricating a waveguiding structure. The waveguiding structure includes a waveguide and an array of semiconductor fins that are arranged at least in part inside the waveguide.

Date

2020

Authors

Y Bian, A Thomas, AP Jacob

Inventors

Yusheng Bian, Abu Thomas, Ajey Poovannummoottil Jacob

Patent_office

US

Patent_number

10670804

Application_number

16234906