Publications
Waveguides including a patterned dielectric layer
Abstract
Structures that include a waveguide and methods of fabricating a structure that includes a waveguide. A tapered feature composed of a dielectric material is arranged over the waveguide. The tapered feature includes a sidewall that is angled relative to a longitudinal axis of the waveguide.
- Date
- October 15, 2019
- Authors
- Y Bian, A Thomas, AP Jacob, KJ Giewont, K Nummy, A Stricker, B Peng
- Inventors
- Yusheng Bian, Abu Thomas, Ajey Poovannummoottil Jacob, Kenneth J Giewont, Karen Nummy, Andreas Stricker, Bo Peng
- Patent_office
- US
- Patent_number
- 10444433
- Application_number
- 16170262