Abstract

(51) Int. Cl. HOIL 27/08(2006. 01) HOIL 29/78(2006. 01) HOIL 29/66(2006. 01) HOIL 29/20(2006. 01) HOIL 29/161(2006. 01) HOIL 21/8238(2006. 01) HOIL 27/092(2006. 01) HOIL 21/84(2006. 01) HOIL 27/12(2006. 01)

Date

2018

Authors

R Xie, AP Jacob

Inventors

Ruilong Xie, Ajey Poovannummoottil Jacob

Patent_office

US

Patent_number

9954104

Application_number

14162948