Abstract

Int. Cl. HOIL 21/00(2006. 01) HOIL 27/15(2006. 01) HOIL 33/06(2010. 01) HOIL 33/16(2010. 01) HOIL 33/32(2010. 01)

Date

2018

Authors

S Banna, D Nayak, AP Jacob

Inventors

Srinivasa Banna, Deepak Nayak, Ajey P Jacob

Patent_office

US

Patent_number

9941330

Application_number

15599458