Publications
Semiconductor devices with conductive contact structures having a larger metal silicide contact area
Abstract
H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, eg PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; Multistep manufacturing processes therefor
- Date
- 2016
- Authors
- R Xie, WJ Taylor Jr, AP Jacob
- Inventors
- Ruilong Xie, William J Taylor Jr, Ajey Poovannummoottil Jacob
- Patent_office
- US
- Application_number
- 15065998