Abstract

(54) METHODS OF FORMING FINFET DEVICES(2013.01); HOIL 21/82.3821 (2013.01); HOIL WITH ALTERNATIVE CHANNEL 27/0924 (2013.01); HOIL 29/66795 (2013.01) MATERLALS(58) Field of Classification Search CPC............ H01L 29/66795; H01L 29/785; H01L (71) Applicant: GLOBALFOUNDRIES Inc., Grand 27/0886; H01L 21/823431; H01L 21/823821; Cayman (KY) H01L 27/0924; H01L 27/1211

Date

2016

Authors

AP Jacob, MK Akarvardar, M Hargrove, R Xie

Inventors

Ajey Poovannummoottil Jacob, Murat Kerem Akarvardar, Michael Hargrove, Ruilong Xie

Patent_office

US

Patent_number

9312387

Application_number

14069955