Publications
Methods of forming replacement gate structures and fins on FinFET devices and the resulting devices
Abstract
METHODS OF FORMING REPLACEMENT GATE STRUCTURES AND FINS ON FNFET DEVICES AND THE RESULTING DEVICES
- Date
- 2016
- Authors
- R Xie, AP Jacob
- Inventors
- Ruilong Xie, Ajey Poovannummoottil Jacob
- Patent_office
- US
- Patent_number
- 9236479
- Application_number
- 14708405