Abstract

(54) METHODS OF FORMING FINS FOR FINFET (52) US Cl. SEMCONDUCTOR DEVICES AND CPC.......... HOIL 29/0692 (2013.01); HOIL 21/308 SELECTIVELY REMOVING SOME OF THE(2013.01); HOIL 21/30608 (2013.01); HOIL FNS BY PERFORMINGA CYCLICAL FIN 21/31 III (2013.01); HOIL 21/31 144 (2013.01); HOIL 29/0649 (2013.01)

Date

2015

Authors

R Xie, A Knorr, AP Jacob, M Hargrove

Inventors

Ruilong Xie, Andreas Knorr, Ajey Poovannummoottil Jacob, Michael Hargrove

Patent_office

US

Patent_number

9147730

Application_number

14195344