Abstract

(54) METHODS OF FORMING ANON-PLANAR (52) US Cl. ULTRA-THIN BODY DEVICE CPC........ HOIL 29/42.356 (2013.01); H0IL 29/785 (2013.01); HOIL 29/66795 (2013.01)(71) Applicant: GLOBALFOUNDRIES INC., GRAND CAYMAN (KY)

Date

2015

Authors

R Xie, AP Jacob, M Hargrove, WJ Taylor Jr

Inventors

Ruilong Xie, Ajey Poovannummoottil Jacob, Michael Hargrove, William J Taylor Jr

Patent_office

US

Application_number

14197686