Abstract

METHODS OF FORMING EPITAXIAL SEMCONDUCTORMATERAL ON SOURCEADRAN REGIONS OF A FINFET SEMCONDUCTOR DEVICE AND THE RESULTING DEVICES

Date

2015

Authors

JA Fronheiser, BV Krishnan, MK Akarvardar, S Bentley, AP Jacob, J Liu

Inventors

Jody A Fronheiser, Bharat V Krishnan, Murat Kerem Akarvardar, Steven Bentley, Ajey Poovannummoottil Jacob, Jinping Liu

Patent_office

US

Application_number

14164934