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Methods of forming FinFET devices with alternative channel materials

Abstract

The following presents a simplified Summary of the inven tion in order to provide a basic understanding of some aspects of the invention. This summary is not an exhaustive overview of the invention. It is not intended to identify key or critical elements of the invention or to delineate the scope of the invention. Its sole purpose is to present some concepts in a simplified form as a prelude to the more detailed description that is discussed later.

Date
2014
Authors
WP Maszara, AP Jacob, NV LiCausi, JA Fronheiser, K Akarvardar
Inventors
Witold P Maszara, Ajey P Jacob, Nicholas V LiCausi, Jody A Fronheiser, Kerem Akarvardar
Patent_office
US
Patent_number
8673718
Application_number
13544259