Publications
Methods of forming FinFET devices with alternative channel materials
Abstract
The following presents a simplified Summary of the inven tion in order to provide a basic understanding of some aspects of the invention. This summary is not an exhaustive overview of the invention. It is not intended to identify key or critical elements of the invention or to delineate the scope of the invention. Its sole purpose is to present some concepts in a simplified form as a prelude to the more detailed description that is discussed later.
- Date
- 2014
- Authors
- WP Maszara, AP Jacob, NV LiCausi, JA Fronheiser, K Akarvardar
- Inventors
- Witold P Maszara, Ajey P Jacob, Nicholas V LiCausi, Jody A Fronheiser, Kerem Akarvardar
- Patent_office
- US
- Patent_number
- 8673718
- Application_number
- 13544259