Abstract

Structures for grating couplers and methods of fabricating a structure including grating couplers. A first grating coupler includes a first plurality of grating structures. An intercon nect structure includes a first metallization level that is positioned over the first grating coupler. A second grating coupler includes a second plurality of grating structures that are arranged in the first metallization level to overlap with the first grating coupler. The second plurality of grating structures are composed of a metal.

Date

2019

Authors

Y Bian, AP Jacob

Inventors

Yusheng Bian, Ajey Poovannummoottil Jacob

Patent_office

US

Patent_number

10185092

Application_number

16032705